UT Dallas 2021 Graduate Catalog

EEMF6322 - Semiconductor Processing Technology

EEMF 6322 (MECH 6348 and MSEN 6322) Semiconductor Processing Technology (3 semester credit hours) Modern techniques for the manufacture of semiconductor devices and circuits. Techniques for both silicon and compound semiconductor processing are studied as well as an introduction to the design of experiments. Topics include: wafer growth, oxidation, diffusion, ion implantation, lithography, etch and deposition. (3-0) T