UT Dallas 2013 Graduate Catalog

EEMF7171 - Current Topics in Plasma Processing

EEMF 7171 Current Topics in Plasma Processing (1 semester hour) Discussion of current literature on plasma processing; applications, diagnostics, sources, chemistry and technology. Knowledge of plasma processing technology (EEMF 6383 preferred). Prerequisite: Consent of instructor. May be repeated for credit. (1-0) Y

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