UT Dallas 2013 Graduate Catalog

EEMF6322 - Semiconductor Processing Technology

EEMF 6322 (MECH 6348, MSEN 6322) Semiconductor Processing Technology (3 semester hours) Modern techniques for the manufacture of semiconductor devices and circuits. Techniques for both silicon and compound semiconductor processing are studied as well as an introduction to the design of experiments. Topics include: wafer growth, oxidation, diffusion, ion implantation, lithography, etch and deposition. (3-0) T