UT Dallas 2016 Graduate Catalog

MSEN6322 - Semiconductor Processing Technology

MSEN 6322 (EEMF 6322 and MECH 6348) Semiconductor Processing Technology (3 semester credit hours) Modern techniques for the manufacture of semiconductor devices and circuits. Techniques for both silicon and compound semiconductor processing are studied as well as an introduction to the design of experiments. Topics include: wafer growth, oxidation, diffusion, ion implantation, lithography, etch and deposition. (3-0) T

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