UT Dallas 2015 Graduate Catalog

EEMF6372 - Semiconductor Process Integration

EEMF 6372 Semiconductor Process Integration (3 semester credit hours) The integration of semiconductor processing technology to yield integrated circuits. The course will emphasize MOSFET design based upon process integration, in particular as it applies to short channel devices of current interest. Process simulation will be used to study diffusion, oxidation, and ion implantation. (3-0) R